Scientific Forums


Pages: (4) « First ... 2 3 [4]   ( Go to first unread post )

Add reply · Start new topic · Start new poll


> End of lithography at 32 nm?, *
treck
Posted: Sep 9 2011, 07:24 AM


Newbie
*

Group: Members
Posts: 1
Joined: 9-September 11

Positive Feedback: 0%
Feedback Score: 0


The word line acts as middle terminal for a vertical transistor, but becomes too resistive if
Top
guiding_light
Posted: Sep 27 2011, 04:30 PM


Advanced Member
*****

Group: Power Member
Posts: 642
Joined: 29-July 05

Positive Feedback: 58.33%
Feedback Score: 4


www.btbmarketing.com/iedm/releases/IEDM_2011_tip_sheet.doc

15-nm NAND Technology Unveiled: Last year’s IEDM saw the unveiling of the world’s first NAND memory built using 25-nm design rules. This year, Hynix Semiconductor researchers have demonstrated mid-1x nm NAND flash memories with excellent electrical characteristics and reliability. To overcome scaling challenges of mid-1x nm NAND devices, new integration technologies have been developed such as a quad-spacer-patterning approach (QSPT), advanced WL air-gap and floating gate slimming processes. A new N±1WL Vpass scheme can mitigate the WL-to-WL high field due to scaling, and improve programming speed and charge loss. (Paper #9.1, “A Middle-1X-nm NAND Flash Memory Cell (M1X-NAND) with Highly Manufacturable Integration Technologies,” J. Hwang et al, Hynix Semiconductor)
Top
guiding_light
Posted: Aug 29 2013, 03:48 AM


Advanced Member
*****

Group: Power Member
Posts: 642
Joined: 29-July 05

Positive Feedback: 58.33%
Feedback Score: 4


http://brion.com/wordpress/wp-content/uplo...performance.pdf

The EUV mask absorber height needs to be optimized for exposure latitude or MEEF for different conventional illumination settings even for 27 nm half-pitch. This means the mask blank deposition has to be targeted for a known pattern well in advance. Unheard of in manufacturing.
Top
Rouissi
Posted: Oct 15 2013, 01:30 PM


Newbie
*

Group: Members
Posts: 1
Joined: 14-October 13

Positive Feedback: 0%
Feedback Score: 0


to go beyond the quantum limit we have to invest more in the Bottom-Up method
Top

Topic Options Pages: (4) « First ... 2 3 [4] 

Add reply · Start new topic · Start new poll


 

Terms of use