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> One Electron Per Sq Nm = 16 Microcoulomb Per Sq Cm, rule of thumb
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20nmon
Posted: Apr 13 2009, 12:01 PM


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But how many electrons per square nm do we want?
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guiding_light
Posted: Apr 13 2009, 03:09 PM


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QUOTE (20nmon @ Apr 13 2009, 12:01 PM)
But how many electrons per square nm do we want?

depends what for. charge storage? lithography?
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20nmon
Posted: Apr 14 2009, 01:02 AM


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I am pretty sure most of the exposure electrons at 8 uC/cm^2 are going through the resist. So I am concerned that not every square nanometer is exposed.
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guiding_light
Posted: Apr 14 2009, 03:07 AM


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QUOTE (20nmon @ Apr 14 2009, 01:02 AM)
I am pretty sure most of the exposure electrons at 8 uC/cm^2 are going through the resist. So I am concerned that not every square nanometer is exposed.

Yes, that is true.

Even with 10 photons or electrons per square nm, the film probably transmits at least 70%, leaving 3 randomly retained, which is hardly enough to alter the film within that small area. It means your feature width will not be well-defined on the nm-scale.
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